HIGH QUALITY R&D SERIVCES USING ANGSTROM-DEP SYSTEMS WITH 20 YEARS OF ALD EXPERIENCES

APPLICATIONS OF ANGSTROM-DEP SYSTEMS

Al2O3 coating on metal substrate

• Thin film doesn't change copper appearance

• Al2O3 film protects copper from oxidation by flames

Tiantium oxide coating on 50nm plastic beads

• Uniform and high quality films using Angstrom-dep powder ALD

• Low temperature ALD on plastic（<80°C）

Titanium dioxide coating inside nanopores

• Film inside of 8nm mesopores

• Matured ALD nanpore surface functionalized technaoloty using Angstrom-dep systems

Nanopore ALD

• Platinum nanoparticle deposited in substrate nanopores

Thin film separation membrane

• Uniform thin film deposited on membrane substrate

Litherium battery cathod powerder coating

• Thin aluminium oxide membrane improves material properties